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Magnetometers based on quantum mechanical processes enable high sensitivityand long-term stability without the need for re-calibration, but theirintegration into fieldable devices remains challenging. This paper presents aCMOS quantum vector-field magnetometer that miniaturizes the conventionalquantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. Byintegrating key components for spin control and readout, the chip performsmagnetometry through optically detected magnetic resonance (ODMR) through adiamond slab attached to a custom CMOS chip. The ODMR control is highly uniformacross the NV centers in the diamond, which is enabled by a CMOS-generated$\sim$2.87 GHz magnetic field with <5% inhomogeneity across a large-areacurrent-driven wire array. The magnetometer chip is 1.5 mm$^2$ in size,prototyped in 65-nm bulk CMOS technology, and attached to a 300$\times$80$\mu$m2 diamond slab. NV fluorescence is measured by CMOS-integratedphotodetectors. This on-chip measurement is enabled by efficient rejection ofthe green pump light from the red fluorescence through a CMOS-integratedspectral filter based on a combination of spectrally dependent plasmonic lossesand diffractive filtering in the CMOS back-end-of-line (BEOL). This filterachieves $\sim$25 dB of green light rejection. We measure a sensitivity of 245nT/Hz$^{1/2}$, marking a 130$\times$ improvement over a previous CMOS-NV sensorprototype, largely thanks to the better spectral filtering and homogeneousmicrowave generation over larger area.

High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers