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This paper presents a millimeter-scale CMOS 64$\times$64 single chargedparticle radiation detector system for external beam cancer radiotherapy. A1$\times$1 $\mu m^2$ diode measures energy deposition by a single chargedparticle in the depletion region, and the array design provides a largedetection area of 512$\times$512 $\mu m^2$. Instead of sensing the voltage dropcaused by radiation, the proposed system measures the pulse width, i.e., thetime it takes for the voltage to return to its baseline. This obviates the needfor using power-hungry and large analog-to-digital converters. A prototype ASICis fabricated in TSMC 65 nm LP CMOS process and consumes the average staticpower of 0.535 mW under 1.2 V analog and digital power supply. Thefunctionality of the whole system is successfully verified in a clinical 67.5MeV proton beam setting. To our' knowledge, this is the first work todemonstrate single charged particle detection for implantable in-vivodosimetry.

A Millimeter-scale Single Charged Particle Dosimeter for Cancer Radiotherapy