English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Tools annual

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools monthly

Global: Zendy Plus monthly

Presents the access of premium content as premium feature

Premium Content

Global: Zendy Plus annual

Global: Zendy Free Plan

Microscopes and various forms of interferometers have been used for decadesin optical metrology of objects that are typically larger than the wavelengthof light {\lambda}. However, metrology of subwavelength objects was deemedimpossible due to the diffraction limit. We report that measurement of thephysical size of sub-wavelength objects with accuracy exceeding {\lambda}/800by analyzing the diffraction pattern of coherent light scattered by the objectswith deep learning enabled analysis. With a 633nm laser, we show that the widthof sub-wavelength slits in opaque screen can be measured with accuracy of0.77nm, challenging the accuracy of electron beam and ion beam lithographies.The technique is suitable for high-rate non-contact measurements of nanometricsizes in smart manufacturing applications with integrated metrology andprocessing tools.

Optical Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence