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We report on controlled growth of photochromic yttrium oxyhydride thin filmsmonitored by $\textit{in-situ}$ composition depth profiling. Films were grownby reactive $e^-$-beam evaporation and subsequently oxidized, whilesimultaneously tracking the oxygen and hydrogen concentrations. Samplecomposition and photochromic response were characterized $\textit{in-situ}$using non destructive ion beam analysis and image analysis, respectively - aswell as complementary $\textit{ex-situ}$ ion beam methods, X-ray diffractionand optical spectrophotometry. We show that photochromic yttrium oxyhydride canbe grown as yttrium dihydride, which is then oxidized to O/H ratios triggeringthe photochromic response.

Synthesis and $\textit{in-situ}$ characterization of photochromic yttrium oxyhydride grown by reactive $e^-$-beam evaporation