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Coherent light sources in silicon photonics are the long-sought holy grailbecause silicon-based materials have indirect bandgap. Traditional strategiesfor realizing such sources, e.g., heterogeneous photonic integration, strainengineering and nonlinear process, are technologically demanding. Here, wedemonstrate a hybrid lasing device composing of perovskite nanocrystals andsilicon nitride nanobeam cavity. We fabricate SiN photonic crystal naonobeamcavities on a solid substrate with significantly improved thermal andmechanical stabilities compared to conventional suspended ones. In addition,adding a PMMA-encapsulation layer on top of the SiN can significantly boost theQ-factor of the cavity mode. By dispersing perovskite nanocrystals as emittersin the PMMA layer, we obtained high-performance coherent emissions in terms oflasing threshold, linewidth and mode volumes. Our work offers a compelling wayof creating solution-processed active integrated photonic devices based on themature platform of silicon photonics for applications in optical informationscience and photonic quantum technology.

CMOS compatible high-performance nanolasing based on perovskite-SiN hybrid integration