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Between 2025 and 2027, some essential components of the CMS (Compact MuonSolenoid) detector - most notably the tracker and the calorimeter endcap - willbe upgraded to prepare for HL-LHC (High Luminosity Large Hadron Collider)conditions. The upgraded CMS Outer Tracker and parts of the new CMS HighGranularity Calorimeter (HGCAL) will encompass over $50{,}000$ new siliconsensors covering a total area of about $800\,\text{m}^{2}$. The sensor seriesproduction requires a dedicated strategy to monitor the quality and stabilityof the production process. The strategy is based on a test structure set thatprovides quick and easy access to critical process parameters. These includeparameters not directly accessible on the sensors (e.g. oxide chargeconcentration and interface trap density) and parameters requiring potentiallydestructive measurements (e.g. dielectric strength). The set is implemented atleast twice on each production wafer. It is divided into test structures forinitial evaluation of the most relevant process parameters and structures forin-depth analysis. All structures can be contacted using a 20-needle probe cardand an automated positioning stage. With this system, the initial analysis ofone wafer is possible in about 30 minutes. In this paper, the CMS collaborationpresents the quality assurance plan for the Phase-2 Upgrade with a focus onprocess quality control. We cover sensor process specifics, the layout of thetest structure set that will be implemented in the production runs for the CMSOuter Tracker and HGCAL, and measurement results illustrating the functionalityof the included test structures.

Process Quality Control Strategy for the Phase-2 Upgrade of the CMS Outer Tracker and High Granularity Calorimeter