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In this paper we present a complete characterization of the first batch ofResistive AC-Coupled Silicon Detectors, called RSD1, designed at INFN Torinoand manufactured by Fondazione Bruno Kessler (FBK) in Trento. With their 100%fill-factor, RSD represent the new enabling technology for high-precision4D-tracking. Indeed, being based on the well-known charge multiplicationmechanism of Low-Gain Avalanche Detectors (LGAD), they benefit from the verygood timing performances of such technology together with an unprecedentedresolution of the spatial tracking, which allows to reach the micron-levelscale in the track reconstruction. This is essentially due to the absence ofany segmentation structure between pads (100% fill-factor) and to other twoinnovative key-features: the first one is a properly doped n+ resistive layer,slowing down the charges just after being multiplied, and the second one is adielectric layer grown on Silicon, inducing a capacitive coupling on the metalpads deposited on top of the detector. The very good spatial resolution(micron-level) we measured experimentally - higher than the nominal pad pitch -comes from the analogical nature of the readout of signals, whose amplitudeattenuates from the pad center to its periphery, while the outstanding resultsin terms of timing (less than 14 ps, even better than standard LGAD) are due toa combination of very-fine pitch, analogical response and chargemultiplication.

High performance picosecond- and micron-level 4D particle tracking with 100% fill-factor Resistive AC-Coupled Silicon Detectors (RSD)