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Plasma jets belong to the category remote plasma. This means that thedischarge conditions and the chemical effect on samples can be tunedseparately, this being a big advantage compared to standard low-pressurereactors. The inductive coupling brings the advantage of a pure and denseplasma. The microwave excitation allows furthermore miniaturization andgeneration of low temperature plasmas. The present paper shows the state of theart of the research on such sources, demonstrating their work up to atmosphericpressure.

Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices