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We investigate the possibilities to realize light extraction from singlecrystal diamond (SCD) nanopillars. This was achieved by dedicated 519 nmlaser-induced spin-state initiation of negatively charged nitrogen vacancies(NV-). For the first time, we present possibility to perform effectivespin-readout of NV(-)s that were naturally generated by the growth processduring chemical vapor deposition (CVD) synthesis within SCD without anypost-growth implantation strategies. Applied diamond was neither implanted with14N+, nor was the CVD synthesized SCD annealed, making the presence of nitrogenvacancy a remarkable phenomenon. To investigate the possibility to realizelight extraction by the utilization of NV(-) bright photoluminescence at roomtemperature and ambient conditions with the waveguiding effect, we haveperformed a top-down nanofabrication of SCD by electron beam lithography (EBL)and dry inductively-coupled plasma/ reactive ion etching (ICP-RIE) to generatelight focusing nanopillars. In addition, we have fluorinated the diamond'ssurface by dedicated 0V ICP plasma. Light extraction and spin manipulationswere performed with photoluminescence (PL) spectroscopy and optically detectedmagnetic resonance (ODMR) at room temperature. We have observed a remarkableeffect based on the selective 0V SF6 plasma etching and surprisingly, incontrast to literature findings, deactivation of NV(-) centers. We discuss thepossible deactivation mechanism in detail regarding 2-dimensional hole gas(2HG) and Fermi band bending.

Light extraction from CVD-grown <400> single crystal diamond nanopillars. Selective charge state manipulations with 0V SF6 plasma