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Magnetic force microscopy (MFM) measurements generally provide phase imageswhich represent the signature of domain structures on the surface ofnanomaterials. To quantitatively determine magnetic stray fields based on anMFM image requires calibrated properties of the magnetic tip. In this work, anapproach is presented for calibrating a magnetic tip using a Co/Pt multilayeredfilm as a reference sample which shows stable well-known magnetic propertiesand well-defined perpendicular band domains. The approach is based on aregularized deconvolution process in Fourier domain with a Wiener filter andthe L-curve method for determining a suitable regularization parameter to get aphysically reasonable result. The calibrated tip is applied for a traceablequantitative determination of the stray fields of a test sample which has apatial frequency spectrum covered by that of the reference sample. According tothe "Guide to the expression of uncertainty in measurement", uncertainties ofthe processing algorithm are estimated considering the fact that theregularization influences significantly the quantitative analysis. We discussrelevant uncertainty components and their propagations between real domain andFourier domain for both, the tip calibration procedure and the stray fieldcalculation, and propose an uncertainty evaluation procedure for quantitativemagnetic force microscopy.

Uncertainty Analysis of Stray Field Measurements by Quantitative Magnetic Force Microscopy