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We optimize a silica-encapsulated silicon L3 photonic crystal cavity forultra-high quality factor by means of a global optimization strategy, where theclosest holes surrounding the cavity are varied to minimize out-of-planelosses. We find an optimal value of $Q_c=4.33\times10^7$, thus setting a newrecord for encapsulated low-index-contrast photonic crystal cavities. We alsoaddress the effects of structural imperfections on our optimal cavity designand predict an averaged $Q_c$ in the 2 million regime for state-of-the-artsilicon fabrication tolerances.

Global optimization of an encapsulated Si/SiO$_2$ L3 cavity for ultra-high quality factor