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This paper reports the first demonstration of beta-phase gallium oxide asoptical waveguides on sapphire substrates grown by metal-organic chemical vapordeposition (MOCVD). The propagation losses from visible to ultraviolet spectrawere comprehensively studied. By optimizing the fabrication processes, minimumpropagation loss was identified to be 3.7 dB/cm at the wavelength of 810 nm,which is comparable to other wide bandgap materials within the III-N family(GaN, AlN). To further reveal the underlying loss mechanisms, several physicalmechanisms such as two-photon absorption, sidewall scattering, top surfacescattering, and bulk scattering were taken into consideration. The resultsobtained from this work suggest that beta-Ga2O3 is promising forultraviolet-visible spectrum integrated photonic applications.

Demonstration of beta-Ga2O3 Optical Waveguides and the Analysis of Their Propagation Losses in the UV-Visible Spectra