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The two-dimensional electron liquid which forms between the band insulatorsLaAlO3 (LAO) and SrTiO3 (STO) is a promising component for oxide electronics,but the requirement of using single crystal SrTiO3 substrates for the growthlimits its applications in terms of device fabrication. It is thereforeimportant to find ways to deposit these materials on other substrates,preferably Si, or Si-based, in order to facilitate integration with existingtechnology. Interesting candidates are micron-sized nanosheets of Ca2Nb3O10which can be used as seed layers for perovskite materials on any substrate. Wehave used low-energy electron microscopy (LEEM) with in-situ pulsed laserdeposition to study the subsequent growth of STO and LAO on such flakes whichwere deposited on Si. We can follow the morphology and crystallinity of thelayers during growth, as well as fingerprint their electronic properties withangle resolved reflected electron spectroscopy. We find that STO layers,deposited on the nanosheets, can be made crystalline and flat; that LAO can begrown in a layer-by-layer fashion; and that the full heterostructure shows thesignature of the formation of a conducting interface.

Growing a LaAlO3/SrTiO3 heterostructure on Ca2Nb3O10 nanosheets