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Photonic integrated circuits that are manufactured with mature semiconductortechnology hold great promise for realizing scalable quantum technology.Efficient interfaces between quantum emitters and nanophotonic devices arecrucial building blocks for such implementations on silicon chips. Theseinterfaces can be realized as nanobeam optical cavities with high qualityfactors and wavelength-scale mode volumes, thus providing enhanced couplingbetween nanoscale quantum emitters and nanophotonic circuits. Realizing suchresonant structures is particularly challenging for the visible wavelengthrange, where many of the currently considered quantum emitters operate, and ifcompatibility with modern semiconductor nanofabrication processes is desired.Here we show that photonic crystal nanobeam cavities for the visible spectrumcan be designed and fabricated directly on-substrate with high quality factorsand small mode volumes. We compare designs based on deterministic andmode-matching methods and find the latter advantageous for on-substraterealizations. Our results pave the way for integrating quantum emitters withnanophotonic circuits for applications in quantum technology.

Optimal photonic crystal cavities for coupling nanoemitters to photonic integrated circuits