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On-chip ultraviolet to infrared (UV-IR) spectrum frequency metrology is ofcrucial importance as a characterization tool for fundamental studies onquantum physics, chemistry, and biology. Due to the strong material dispersion,traditional techniques fail to demonstrate the device that can be applied togenerate coherent broadband spectrum that covers the full UV-IR wavelengths. Inthis work, we explore several novel techniques for supercontinuum generationcovering near-UV to near-IR spectrum using AlN micro-photonic waveguides, whichis essential for frequency metrology applications: First, to create anomalousdispersion, high order mode (TE10) was adopted, together with its carefullydesigned high efficiency excitation strategies. Second, the spectrum wasbroadened by soliton fission through third order dispersion and second harmonicgeneration, by which directional energy transfer from near-IR to near-UV can beobtained. Finally, high quality single crystalline AlN material was used toprovide broadband transparency from UV to IR. Under decently low pulse energyof 0.36 nJ, the experimental spectrum from supercontinuum generation coversfrom 490 nm to over 1100 nm, with a second harmonic generation band coveringfrom 405 nm to 425 nm. This work paves the way towards UV-IR full spectrumon-chip frequency metrology applications.

On-chip directional octave-spanning supercontinuum generation from high order mode in near ultraviolet to infrared spectrum using AlN waveguides