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We demonstrate fabrication of single-mode optical waveguides on lithiumniobate on insulator (LNOI) by optical patterning combined withchemo-mechanical polishing. The fabricated LNOI waveguides have a nearlysymmetric mode profile of a mode field size of ~2.5 micron (full-width at halfmaximum). We develop a high-precision measurement approach by which the singlemode waveguides are characterized to have a propagation loss of ~0.042 dB/cm.

High-precision measurement of a propagation loss of single-mode optical waveguides on lithium niobate on insulator