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Since the discovery of electrons, an accurate detection of electrical chargeshas been the dream of scientific community. Due to some remarkable advantages,micro/nano-electromechanical systems (M/NEMS) based resonators have been usedto design electrometers with exquisite sensitivity and resolution. Inevitably,some limits including requisite ultra-low environmental temperature,complicated resonator structure and measurement circuit, required lineardynamic response, will cause a gap with respect to practical application. Here,we demonstrate a novel ultra-sensitive charge detection based on the lineardependence of peak frequency drift on the coupling voltage variation of twocoupled nonlinear micromechanical resonators. We achieved ultra-high resolutionof 2.051E-3 fC (about 13 electrons) of charge detection at the roomtemperature. We also show an extra application of this device for weak andultra-low-frequency (ULF) signal detection. Our findings provide a simplestrategy for measuring electron charges in an extreme accuracy and developingelectrometers in smaller sizes.

Ultrasensitive charge detection utilizing coupled nonlinear micromechanical resonators