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Iterative Monte Carlo algorithm has been constructed and tested forquantification of X-ray fluorescence analysis in order to determine the atomiccomposition of solid materials. The calculation model uses simulation codeMCNP6 that describes the excitation and relaxation phenomenon in the atomicelectron shell. The complete analytical procedure was tested by quantitativeanalysis of standard reference alloy materials. Acceptable agreement was foundbetween the calculated and nominal concentrations within the standarddeviations of the concentrations of the major elements. The total duration ofthe repeatedly performed Monte Carlo numerical computation for the entireanalysis was only a few minutes, due to the application of variance reductionprocedures available in the Monte Carlo code. A frame software was designed andwritten in MatLab programming environment for controlling the iterativecalculation of the elementary composition of the sample material.

Quantification model of X-ray fluorescence analysis based on iterative Monte Carlo procedure