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Whether it is for transmitting information or for controlling intensity,light modulation is among the essential functions commonly used in complexoptical systems. In integrated optics, modulation principles usually includethe use of electro-optical effects or acousto-optics varying index waves. Here,we demonstrate a concept of light-modulation based on a vibrating suspendedcantilever clamped on both ends, acting as an optical waveguide. In thisapproach, an optical phase shift is introduced by the physical elongation andby the stress induced in the vibrating cantilever. Most interesting, such adevice can store optical information in the form of a phase shift, related tothe frequency path-dependence of the vibration. This remarkable property stemsfrom the intrinsic non-linear dynamical behavior of the device, resemblingDuffing-like oscillators. In this proof-of-concept, the micro-device ismanufactured in a single fused silica chip using femtosecond laser exposurecombined with chemical etching and CO2-laser polishing to achieve opticalroughness quality. The cantilever vibration results from dielectrophoresisforces arising in the silica beam as a consequence of the non-uniformelectrostatic field applied to it. Noticeably, being made entirely of fusedsilica, the device is capable of broadband operation, from the near UV to themid-IR range, and this, at kHz frequencies.

Optomechanical suspended waveguide for broadband phase modulation with frequency memory effect