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A 0.8 mm$^3$ wireless, ultrasonically powered, free-floating neural recordingimplant is presented. The device is comprised only of a 0.25 mm$^2$ recordingIC and a single piezoceramic resonator that is used for both power harvestingand data transmission. Uplink data transmission is performed by analogamplitude modulation of the ultrasound echo. Using a 1.78 MHz main carrier, >35kbps/mote equivalent uplink data rate is achieved. A technique to linearize theecho amplitude modulation is introduced, resulting in <1.2\% staticnonlinearity of the received signal over a $\pm$10 mV input range. The ICdissipates 37.7 $\mu$W, while the neural recording front-end consumes 4 $\mu$Wand achieves a noise floor of 5.3 $\mu$V$_{rms}$ in a 5 kHz bandwidth. Thiswork improves sub-mm recording mote depth by >2.5x, resulting in the highestmeasured depth/volume ratio by $\sim$3x. Orthogonal subcarrier modulationenables simultaneous operation of multiple implants, using a single-elementultrasound external transducer. Dual-mote simultaneous power up and datatransmission is demonstrated at a rate of 7 kS/s at the depth of 50 mm.

A Sub-mm$^3$ Ultrasonic Free-floating Implant for Multi-mote Neural Recording