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An electrically tunable terahertz (THz) plasmonic device is designed andfabricated using liquid metals (eutectic gallium indium EGaIn) and shape memoryalloy wires (Flexinol). The liquid metal is injected into the voids of apoly(dimethyl) siloxane (PDMS) microfluidic mold forming a periodic array ofsubwavelength apertures, while the wires are inserted into the elastomer belowthe metal plane. When a DC voltage is applied to the wires, they contract viaJoule heating, reducing the aperture periodicity and blue-shifting thetransmission resonances of the device. When the voltage is removed, the wirescool and elongate back to their original length, allowing the transmissionspectrum to return to its original state. The magnitude of this change dependsupon the applied voltage. The device is shown to thermally cycle between therelaxed state and the fully contracted state reproducibly over at least 500thermal cycles. The asymmetric geometry of the device and the contractionprocess yield transmission properties that are unexpected: two closely spacedresonances, where both resonances correspond to the same scattering indices,and an increase in the transmission amplitude of the lowest order resonanceupon contraction. We use numerical simulations to understand these features.

An electrically tunable terahertz plasmonic device based on shape memory alloys and liquid metals