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In this paper, we report on the use of tantalum and iridium as adhesionlayers for platinum electrodes used in high temperature SAW devices based onlangasite substrates (LGS). Unlike iridium, tantalum exhibits a great adhesivestrength, and a very low mobility through the Pt film, ensuring a devicelifetime of at least half an hour at 1000{\textdegree}C. The latter is limitedby morphological modifications of platinum, starting by the apparition ofcrystallites on the surface, and followed by important terracing and breakingof the film continuity. SNMS and XRD measurements allowed us to show that thesephenomena are likely intrinsic to platinum film, whatever be the nature of theadhesion layer. Finally, after having outlined a possible scenario leading tothis deterioration, we consider some solutions that could replace platinum inorder to increase the lifetime of LGS-based SAW devices in high temperaturesconditions.

Study of tantalum and iridium as adhesion layers for Pt/LGS high temperature SAW devices