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Metal-dielectric interfaces of various geometries are fundamental photonicmaterial platforms for surface plasmons. Surface plasmon polaritons andlocalized surface plasmons are two surface plasmon modes that are excited onplanar and curved metal-dielectric interfaces, respectively. Herein, wedemonstrate in-situ formation of silver nanoparticles by diffusion at a planarinterface between sputter-deposited silver and nitride dielectrics. In onestep, we synthesize a nanostructure that exhibits both localized surfaceplasmon resonances at silver nanoparticles and surface plasmon resonances atthe planar interface. We develop an accurate optical model describing bothsurface plasmon modes by applying effective medium theories to experimentalToF-SIMS and XPS depth profiles. Our findings provide fundamental materialinsights into intrinsic metal-dielectric interfacial defects, along with a newin-situ nanoparticle synthesis method that seamlessly integrates withconventional fabrication of planar interfaces. These unique results open theprospect of promising photonic-plasmonic applications availing the coupling ofboth surface plasmon modes.

Dual Plasmonic Modes from In-Situ Silver Nanoparticle Formation via Diffusion at Silver / Dielectric Interfaces