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Robust strain gauges are fabricated by growing PtSe2 layers directly on topof flexible polyimide foils. These PtSe2 layers are grown by low-temperature,thermally-assisted conversion of predeposited Pt layers. Under applied flexurethe PtSe2 layers show a decrease in electrical resistance signifying a negativegauge factor. The influence of the growth temperature and film thickness on theelectromechanical properties of the PtSe2 layers is investigated. Thebest-performing strain gauges fabricated have a superior gauge factor to thatof commercial metal-based strain gauges. Notably, the strain gauges offer goodcyclability and are very robust, surviving repeated peel tests and immersion inwater. Furthermore, preliminary results indicate that the stain gauges alsoshow potential for high-frequency operation. This host of advantageousproperties, combined with the possibility of further optimization and channelpatterning, indicate that PtSe2 grown directly on polyimide holds great promisefor future applications.

PtSe2 grown directly on polymer foil for use as a robust piezoresistive sensor