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Perovskite oxide based thin film gas sensors have long been considered aspotential alternatives to commonly investigated binary metal oxides basedsensors. BiFeO3, which is a prototype of p-type perovskite based semiconductingoxides, has recently drawn significant attention for its promising gas sensingcharacteristics. In the present work, the hydrogen sensing characteristics ofcalcium doped BiFeO3 has been reported by varying the film thickness, dopingconcentration, operating temperature, and test gas concentration. The filmswere deposited on glass substrates by sol-gel route using spin coating. X-raydiffraction analyses confirmed formation of phase pure films and scanningelectron microscopy confirmed their uniform and dense microstructure. TheCa-doped BiFeO3 sensors exhibit higher sensitivity compared to pure BiFeO3sensors. It is reported that the film thickness and Ca doping concentrationplay major role to control hydrogen sensing characteristics of the depositedfilms. The sensor based on 15% Ca-doped BiFeO3 sensor exhibited very highsensitivity (~212 % at 500 ppm H2), and excellent selectivity towards hydrogenat a moderate operating temperature (~250 {\deg}C).The enhanced gas sensingresponse of the doped BiFeO3 films has been attributed to the higher oxygenvacancy concentration induced by incorporation of aliovalent Ca2+.

Hydrogen sensing characteristics of perovskite based calcium doped BiFeO3 thin films