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This work investigates the behavior of an AlGaAs/GaAs piezoelectric nonlinearMEMS oscillator exhibiting a 1:3 internal resonance. The device is explored inan open-loop configuration, i.e. as a driven resonator, where depending on thedrive conditions we observe energy transfer between the first and third modes,and the emergence of supercritical Hopf limit cycles. We examine the dependenceof these bifurcations on the oscillator's frequency and amplitude, andreproduce the observed behavior using a system of nonlinearly coupled equationswhich show interesting scaling behavior.

Limit cycles and bifurcations in a nonlinear MEMS oscillator with a 1:3 internal resonance. Part I: The case of a driven resonator