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Phase shifting interferometric (PSI) techniques are among the most sensitivephase measurement methods. Owing to its high sensitivity, any minute phasechange caused due to environmental instability results into, inaccurate phasemeasurement. Consequently, a well calibrated piezo electric transducer (PZT)and highly-stable environment is mandatory for measuring accurate phase mapusing PSI implementation. Here, we present a new method of recording temporalphase shifted interferograms and a numerical algorithm, which can retrievephase maps of the samples with negligible errors under the ambientenvironmental fluctuations. The method is implemented by recording a video ofcontinuous temporally phase shifted interferograms and phase shifts werecalculated between all the data frames using newly developed algorithm with ahigh accuracy less than or equal to 5.5*10-4*pi rad. To demonstrate therobustness of the proposed method, a manual translation of the stage wasemployed to introduce continuous temporal phase shift between data frames. Thedeveloped algorithm is first verified by performing quantitative phase imagingof optical waveguide and red blood cells using uncalibrated PZT under theinfluence of vibrations/air turbulence and compared with the well calibratedPZT results. Furthermore, we demonstrated the potential of the proposedapproach by acquiring the quantitative phase imaging of an optical waveguidewith a rib height of only 2 nm. By using 12-bit CMOS camera the height ofshallow rib waveguide is measured with a height sensitivity of 4 Angstromwithout using PZT and in presence of environmental fluctuations.

Sub-nanometer height sensitivity by phase shifting interference microscopy under ambient environmental fluctuations