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We develop a technique for realizing lithium niobate on insulator (LNOI)waveguides of a multi-centimeter-length with a propagation loss as low as 0.027dB/cm. Our technique relies on patterning a chromium (Cr) thin film coated onthe top surface of LNOI into a hard mask with a femtosecond laser followed bythe chemo-mechanical polishing for structuring the LNOI into the waveguides.The surface roughness on the waveguides is determined to be 0.452 nm with anatomic force microscope (AFM). The approach is compatible with other surfacepatterning technologies such as optical and electron beam lithographies orlaser direct writing, enabling high-throughput manufacturing of large-scaleLNOI-based photonic integrated circuits.

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness