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We experimentally demonstrate a simple micro-electro-mechnical systems (MEMS)approach to acoustic metamaterials and have observed the average increase ofnearly 6 dB beyond the classic law for sound attenuation at low frequenciesfrom 200 Hz to 1200 Hz. Here, we have also found that the MEMS metastructure,especially the cavity-backed micromembrane, contributes to 22.3% gain of soundtransmission loss (STL) with a fill factor of perforation of less than 7.6%.

MEMS approach to low-frequency broadband acoustic metamaterials