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We demonstrate that vacuum forming of 10-cm diameter silicon wafers ofvarious crystallographic orientations under an x-ray permeable, flexible windowcan easily generate spherically bent crystal analyzers (SBCA) and toroidallybent crystal analyzers (TBCA) with ~1-eV energy resolution and a 1-m majorradius of curvature. In applications at synchrotron light sources, x-ray freeelectron lasers, and laboratory spectrometers these characteristics aregenerally sufficient for many x-ray absorption fine structure (XAFS), x-rayemission spectroscopy (XES), and resonant inelastic x-ray scattering (RIXS)applications in the chemical sciences. Unlike existing optics manufacturingmethods using epoxy or anodic bonding, vacuum forming without adhesive istemporary in the sense that the bent wafer can be removed when vacuum isreleased and exchanged for a different orientation wafer. Therefore, thecombination of an x-ray compatible vacuum-forming chamber, a library of thinwafers, and a small number of forms having different secondary curvatures cangive extreme flexibility in spectrometer energy range. As proof of this methodwe determine the energy resolution and reflectivity for several suchvacuum-formed bent crystal analyzers (VF-BCA) in laboratory based XAFS and XESstudies using a conventional x-ray tube. For completeness we also show x-rayimages collected on the detector plane to characterize the resulting focalspots and optical aberrations.

Vacuum Formed Temporary Spherical and Toroidal Bent Crystal Analyzers for High Resolution X-ray Spectroscopy