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This paper develops a resolution enhancement method for post-processing theimages from Atomic Force Microscopy (AFM). This method is based on deeplearning neural networks in the AFM topography measurements. In this study, avery deep convolution neural network is developed to derive the high-resolutiontopography image from the low-resolution topography image. The AFM measuredimages from various materials are tested in this study. The derivedhigh-resolution AFM images are comparable with the experimental measuredhigh-resolution images measured at the same locations. The results suggest thatthis method can be developed as a general post-processing method for AFM imageanalysis.

General Resolution Enhancement Method in Atomic Force Microscopy (AFM) Using Deep Learning