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We present experimental results on second-harmonic generation innon-stoichiometric, silicon-rich nitride (SRN) films. The as-deposited filmpresents a second-order nonlinear coefficient, or \c{hi}(2), as high as 8pm/V.This value can be widely tuned using the electric field induced second harmoniceffect (EFISH), and a maximum value of 22.7pm/V was achieved with thistechnique. We further illustrate that the second-order nonlinear coefficientexhibited by these films can be highly dispersive in nature, and requiresfurther study and analysis to evaluate their viability for in-waveguideapplications at telecommunication wavelengths.

On observation of dispersion in tunable second-order nonlinearities of silicon-rich nitride thin films