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In this paper, design and simulation of a compact on-chip antenna for 60 GHzband applications is presented. Antenna is designed in 65nm TSMC technology.This technology consists of 9 metal layers. A 0.7 mm * 0.7 mm patch with slotsis located on 9th layer and first layer is used as ground plane. Total chipsize is 0.8 mm * 0.8 mm. In order to enhance radiation efficiency and controlaxial ratio, four slots are adjusted on ground plane. Circular and linearpolarizations are achievable by proper port excitation. Maximum efficiency ofthe antenna is about 60% at 59.6 GHz. Simulated antenna bandwidth ranges from58.7 GHz as band start and 62.3 GHz as band stop. Peak gain values forcircularly and linearly polarized modes are -0.6 dB and -0.9 dB at 0respectively.

Compact 60GHz On-Chip Antenna in 65nm CMOS Technology With Circular and Linear Polarizations for Millimeter-Wave Applications