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At advanced process nodes, pattern matching techniques have been used in thedetection of lithography hotspots, which can affect yields of manufacturedintegrated circuits. Although commercial pattern matching and in-design hotspotfixing tools have been developed, engineers still need to verify that specifichotspot patterns in routed designs can indeed be detected or even repaired bysoftware tools. Therefore, there is the need to create test cases with whichtargeted hotspot patterns can be generated in routed layouts by using an APR(automatic placement and routing) tool. In this paper, we propose a methodologyof creating hotspot patterns in the routing space by using Synopsys tools.Also, methods for repairing hotspots during the physical design phase arepresented. With the use of the proposed hotspot creation methodology, we cangenerate routed designs containing targeted hotspot patterns. As a result, theeffectiveness of hotspot detection rules, hotspot fixing guidance rules, andrelevant software tool functions can be verified.

Creation and Fixing of Lithography Hotspots with Synopsys Tools