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The MagAO-X instrument is an upgrade of the Magellan AO system that willintroduce extreme adaptive optics capabilities for high-contrast imaging atvisible and near-infrared wavelengths. A central component of this system is a2040-actuator microelectromechanical (MEMS) deformable mirror (DM) from BostonMicromachines Corp. (BMC) that will operate at 3.63 kHz for high-orderwavefront control. Two additional DMs from ALPAO will perform low-order andnon-common-path science-arm wavefront correction. The accuracy of the wavefrontcorrection is limited by our ability to command these DMs to a desired shape,which requires a careful characterization of each DM surface. We have developeda characterization pipeline that uses a Zygo Verifire Interferometer to measurethe surface response and a Karhunen-Lo\`eve transform to remove noise from ourmeasurements. We present our progress in the characterization process and theresults of our pipeline applied to an ALPAO DM97 and a BMC Kilo-DM,demonstrating the ability to drive the DMs to a flat of $\lesssim$ 2nm and$\lesssim$ 4nm RMS in our beam footprint on the University of Arizona WavefrontControl (UAWFC) testbed.

Characterization of deformable mirrors for the MagAO-X project