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We propose the use of germanium-on-silicon technology for indirecttime-of-flight based three-dimensional sensing, and demonstrate a novel lock-inpixel featuring high quantum efficiency and large frequency bandwidth. Comparedto silicon pixels, germanium-on-silicon pixels simultaneously maintain a highquantum efficiency and a high demodulation contrast deep into GHz frequencyregime, which enable consistently superior depth accuracy in both indoor andoutdoor scenarios. Physical model, numerical simulation, device fabrication andcharacterization, system performance comparison, and laser safety analysis arepresented. Our work paves a new path to high-performance time-of-flight rangersand imagers, as well as potential adoption of lasers operated at a longer nearinfrared wavelength that falls outside of the operation window of siliconpixels.

Proposal and demonstration of germanium-on-silicon lock-in pixels for indirect time-of-flight based three-dimensional sensing