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We report on a flow velocity measurement technique based on snap-throughdetection of an electrostatically actuated, bistable micromechanical beam. Weshow that induced elecro-thermal Joule heating and the convective air coolingchange the beam curvature and consequently the critical snap-through voltage($V_{ST}$). Using single crystal silicon beams, we demonstrate the snap-throughvoltage to flow velocity sensitivity of $dV_{\text{ST}}/du \approx0.13$ V sm$^{-1}$ with a power consumption of $\approx360\; \mu$W. Our experimentalresults were in accord with the reduced order, coupled,thermo-electro-mechanical model prediction. We anticipate thatelectrostatically induced snap-through in curved, micromechanical beams willopen new directions for the design and implementation of downscaled flowsensors for autonomous applications and environmental sensors.

Flow sensor based on the snap-through detection of a curved micromechanical beam