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Due to the rapid growth in demand for power for sensing devices located inremote locations, scientists' attention has been drawn to vibration energyharvesting as an alternative to batteries. As a result of over two decades ofmicro-scale vibration energy harvester research, the use of mechanicalnonlinearity in the dynamic behavior of the piezoelectric power generatingstructures had been recognized as one of the promising solutions to thechallenges presented by chaotic, low-frequency vibration sources found incommon application environments. In this study, the design and performance of aunique MEMS-scale nonlinear vibration energy harvester based on coupledcomponent structures and bi-stable states are investigated. Thecoupled-components within the device consist of a main buckled beam bonded withpiezoelectric layers, a torsional rod, and two cantilever arms with tip massesat their ends. These arms are connected to the main beam through the torsionalrod and are designed to help the main beam snap between its buckled stablestates when subjected to sufficient vibration loading. The fabrication of thedevice will be discussed, including use of plasma-enhanced chemical vapordeposition (PECVD) of silicon nitride under an alternating power field tocontrol compressive stress development within the main buckled beam. Aftercompleting the fabrication process, the next step would be testing the deviceunder a variety of vibration loading conditions for its potential use as avibration energy harvester.

A MEMS-scale vibration energy harvester based on coupled component structure and bi-stable states