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Software defined radios (SDR) in the microwave X and K bands offer thepromise of low cost, programmable operation with real-time frequency agility.However, the real world in which such radios operate requires them to be ableto detect nanowatt signals in the vicinity of 100 kW transmitters. This imposesthe need for selective RF filters on the front end of the receiver to block thelarge, out of band RF signals so that the finite dynamic range of the SDR isnot overwhelmed and the desired nanowatt signals can be detected and digitallyprocessed. This is currently typically done with a number of narrow bandfilters that are switched in and out under program control. What is needed is asmall, fast, wide tuning range, high Q, low loss filter that can continuouslytune over large regions of the microwave spectrum. In this paper we show howextreme throw MEMS actuators can be used to build such filters operating up to15 GHz and beyond. The key enabling attribute of our MEMS actuators is thatthey have large, controllable, out-of-plane actuation ranges of a millimeter ormore. In a capacitance-post loaded cavity filter geometry, this givessufficient precisely controllable motion to produce widely tunable devices inthe 4-15 GHz regime.

High Performance, Continuously Tunable Microwave Filters using MEMS Devices with Very Large, Controlled, Out-of-Plane Actuation