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Confocal laser scanning microscopy (CLSM) is a non-destructive,highly-efficient optical characterization method for large-area analysis ofgraphene on different substrates, which can be applied in ambient air, does notrequire additional sample preparation, and is insusceptible to surface chargingand surface contamination. CLSM leverages optical properties of graphene andprovides greatly enhanced optical contrast and mapping of thickness down to asingle layer. We demonstrate the effectiveness of CLSM by measuringmechanically exfoliated and chemical vapor deposition graphene on Si/SiO2, andepitaxial graphene on SiC. In the case of graphene on Si/SiO2, both CLSMintensity and height mapping is powerful for analysis of 1-5 layers ofgraphene. For epitaxial graphene on SiC substrates, the CLSM intensity allowsus to distinguish features such as dense, parallel 150 nm wide ribbons ofgraphene (associated with the early stages of the growth process) and largeregions covered by the interfacial layer and 1-3 layers of graphene. In bothcases, CLSM data shows excellent correlation with conventional opticalmicroscopy, atomic force microscopy, Kelvin probe force microscopy, conductiveatomic force microscopy, scanning electron microscopy and Raman mapping, with agreatly reduced acquisition time. We demonstrate that CLSM is an indispensabletool for rapid analysis of mass-produced graphene and is equally relevant toother 2D materials.

Confocal laser scanning microscopy: A tool for rapid optical characterization of 2D materials