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The generation of low-emittance electron beams has received significantinterest in recent years. Driven by the requirements of X-ray free electronlasers, the emittance of photocathode injectors has been reduced significantly,with a corresponding increase in beam brightness. At the same time, this hasput increasingly stringent requirements on the instrumentation to measure thebeam size. These requirements are even more stringent for novel acceleratordevelopments, such as laser-driven accelerators based on dielectric structuresor on a plasma, or for linear colliders at the energy frontier. We present herethe generation and measurement of a sub-micrometer electron beam, at a particleenergy of 330 MeV, and a bunch charge below 1 pC. An electron beam optics witha beta-function of a few millimeters in the vertical plane had been set up. Thebeam was characterized through a wire scanner that employs a 1 um wide metallicstructure fabricated using the electron beam lithography on a silicon nitridemembrane. The smallest (rms) beam size presented here is less than 500 nm.

Generation and Measurement of Sub-Micrometer Relativistic Electron Beams