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Aluminum nitride and silicon nitride have recently emerged as importantnonlinear optical materials in integrated photonics respectively for theirquadratic and cubic optical nonlinearity. A composite aluminum nitride andsilicon nitride waveguide structure, if realized, will simultaneously allowhighly efficient second and third harmonic generation on the same chip platformand therefore assists 2f-3f self-referenced frequency combs. On-chip thirdharmonic generation, being a higher order nonlinear optics effect, is moredemanding than second harmonic generation due to the large frequency differencebetween the fundamental and third harmonic frequencies which implies largechange of refractive indices and more strigent requirements on phase matching.In this work we demonstrate high-efficiency third harmonic generation in a highQ composite aluminum nitride / silicon nitide ring cavity. By carefullyengineering the microring resonator geometry of the bilayer structure tooptimize the quality factor, mode volume and modal overlap of the opticalfields, we report a maximum conversion efficiency of $180\%\,\mathrm{W^{-2}}$.This composite photonic chip design provides a solution for efficient frequencyconversion over a large wavelength span, broadband comb generation andself-referenced frequency combs.

Efficient Third Harmonic Generation in Composite Aluminum Nitride / Silicon Nitride Microrings