English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

This study presents a detailed examination of the lattice distortionsintroduced by glancing incidence Focussed Ion Beam (FIB) milling. Usingnon-destructive multi-reflection Bragg coherent X-ray diffraction we probedamage formation in an initially pristine gold micro-crystal following severalstages of FIB milling. These experiments allow access to the full latticestrain tensor in the micro-crystal with ~25 nm 3D spatial resolution, enablinga nano-scale analysis of residual lattice strains and defects formed. Ourresults show that 30 keV glancing incidence milling produces fewer largedefects than normal incidence milling at the same energy. However the resultingresidual lattice strains have similar magnitude and extend up to ~50 nm intothe sample. At the edges of the milled surface, where the ion-beam tails impactthe sample at near-normal incidence, large dislocation loops with a range ofburgers vectors are formed. Further glancing incidence FIB polishing with 5 keVion energy removes these dislocation loops and reduces the lattice strainscaused by higher energy FIB milling. However, even at the lower ion energy,damage-induced lattice strains are present within a ~20 nm thick surface layer.These results highlight the need for careful consideration and management ofFIB damage. They also show that low-energy FIB-milling is an effective tool forremoving FIB-milling induced lattice strains. This is important for thepreparation of micro-mechanical test specimens and strain microscopy samples.

Glancing-Incidence Focussed Ion Beam Milling: A Coherent X-ray Diffraction Study of 3D Nano-scale Lattice Strains and Crystal Defects