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Efficient coupling of single quantum emitters to guided optical modes ofintegrated optical devices is of high importance for applications in quantuminformation science as well as in the field of sensing. Here we present thedesign and fabrication of a platform for on-chip experiments based ondielectric optical single-mode waveguides(Ta2O5 on SiO2). The design of thewaveguide is optimized for broadband (600-800 nm) evanescent coupling to asingle quantum emitter (expected efficiency: up to 36%) and efficient off-chipcoupling to single-mode optical fibers using inverted tapers. First testsamples exhibit propagation losses below 1.8 dB/mm and off-chip couplingefficiencies exceeding 57%. These results are promising for efficient couplingof solid state quantum emitters like NV- and SiV-centers to a single opticalmode of a nanoscale waveguide.

Design, Fabrication, and Characterization of Ta2O5 Photonic Strip Waveguides