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In Directed Self Assembly (DSA), poor printing of guiding templates can causemisassembly resulting in high defect probability. Therefore, hotspots should beavoided in the choice of the DSA groups. Accordingly, Directed Self-Assembly(DSA) technologies which use Multiple Patterning (MP) to print the guidingtemplates need to be aware of hotspots during the DSA grouping and MPDecomposition. In this paper, we present a hotspot-aware heuristic for DSAgrouping and MP decomposition. Results show that that the proposed heuristiceliminates 78% of the hotspots and conflicts that result from using ahotspot-unaware grouping and decomposition algorithm. In comparison to theoptimal solution using Integer Linear Programming, the proposed heuristicresults in ~24% more violations.

Hotspot-aware DSA Grouping and Mask Assignment