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This paper presents theoretical analysis of a MEMS electrostatic energyharvester configured as the Bennet's doubler. Steady-state operation of thedoubler circuit can be approximated by a right-angled trapezoid Q-V cycle. Asimilarity between voltage doubler and resistive-based charge-pump circuit ishighlighted. By taking electromechanical coupling into account, the analyticalsolution of the saturation voltage is the first time derived, providing agreater comprehension of the system performance and multi-parameter effects.The theoretical approach is verified by results of circuit simulation for twocases of mathematically idealized diode and of Schottky diode. Development ofthe doubler/multiplier circuits that can further increase the saturationvoltage is investigated.

Theoretical analysis of electrostatic energy harvester configured as Bennet's doubler based on Q-V cycles