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Three dimensional (3D) fast (< 0.5 hour) printing of micro-optical elementsdown to sub-wavelength resolution over 100 micrometers footprint areas usingfemtosecond (fs-)laser oscillator is presented. Using sub-1 nJ pulse energies,optical vortex generators made of polymerised grating segments with anazimuthally changing orientation have been fabricated in SZ2080 resist; widthof polymerised rods was ~150 nm and period 0.6-1 micrometers. Detailed phaseretardance analysis was carried out manually with Berek compensator (under awhite light illumination) and using an equivalent principle by an automatedAbrio implementation at 546 nm. Direct experimental measurements of retardancewas required since the period of the grating was comparable (or larger) thanthe wavelength of visible light. By gold sputtering, transmission-type opticalvortex generators were turned into reflective ones with augmented retardance,n.h defined by the form birefringence, n, and the height h = 2d where d is thethickness of the polymerised structure. Retardance reached 315 nm as measuredwith Berek compensator at visible wavelengths. Birefringent phase delays of 180degrees (or half-wavelength) required for high purity vortex generators can bemade based on the proposed approach. Optical vortex generators for telecomwavelengths with sub-wavelength patterns of azimuthally oriented gratings areamenable by direct laser polymerisation.

3D laser printing by ultra-short laser pulses for micro-optical applications: towards telecom wavelengths