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Nonlinear dynamics of a two-side electro-statically actuated capacitivemicro-beam is studied. The piezoelectric actuation leads to the generation ofan axial force along the length of the micro-beam and this is used as a tuningtool to shift the primary resonance of the micro-resonator. The governingequation of motion is derived by minimization of the Hamiltonian andgeneralized to the viscously damped systems. The periodic solutions in thevicinity of the primary resonance are detected and their stability isinvestigated. The basins of attraction conforming to three individual periodicorbits are determined. The outcomes show that the higher the amplitude of theperiodic orbit, the smaller is the area of the attractor.

Biosensing using Functionally Graded Piezoelectric MEMS Resonators