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The effects of the tilt of the crystallographic orientation with respect toan incident electron probe on high-angle annular dark field (HAADF) imaging inaberration-corrected scanning transmission electron microscopy (STEM) have beeninvestigated with experiments and simulations. A small specimen tilt can leadto unequal deviations of different atom species in the HAADF image and resultin further relative displacement between anions and cations. Simulated HAADFimages also confirm that the crystal tilt causes an artifact in atompolarization as well. The effect is derived from the scattering ability ofdifferent atoms.

The origin of atomic displacements in HAADF images of the tilted specimen