English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

Magnetic field (B) distribution of the magnetron was measured and discussedits effect on plasma parameters and deposition rate. Plasma parameters such aselectron temperature (Te), electron number density (ne) were estimated usingelectron flux (EF) and electron energy distribution function (EEDF) methods asfunction of axial, radial distances from the cathode. Te and ne decreased withincreasing of axial, radial distances from the cathode. Dr was obtained for thesame positions where the above plasma parameters were measured, and found thatsimilar profile with Te and ne. Magnetron configuration was simulated usingCOMSOL Multiphysics software and compared with the experimentally measuredprofile. Further, density distribution was simulated using measured B throughparticle in cell - Monte Carlo collision and found simulation results are wellsupported to the experimental results.

Influence of magnetic field on plasma parameters and thin film deposition along axial and radial distances in DC magnetron